Patent Assignment
Reel/Frame 046127/0965
Assignment of Assignor's Interest
Recorded: 2018-06-19
Pages: 4
Assignors
SONG, YI
Executed: 2018-06-13
BASKAR, VEERARAGHAVAN S.
Executed: 2018-06-13
STRANE, JAY W.
Executed: 2018-06-13
DE SILVA, EKMINI ANUJA
Executed: 2018-06-13
Assignee
INTERNATIONAL BUSINESS MACHINES CORPORATION
NEW ORCHARD ROAD, ARMONK, NEW YORK, 10504
Covered Property
(1)
Controlling Active Fin Height of Finfet Device Using Etch Protection Layer to Prevent Recess of Isolation Layer During Gate Oxide Removal