Patent Assignment
Reel/Frame 046132/0778
Assignment of Assignor's Interest
Recorded: 2018-06-19
Pages: 6
Assignee
TOKYO ELECTRON LIMITED
3-1, AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Method of Quasi-Atomic Layer Etching of Silicon Nitride