Patent Assignment
Reel/Frame 046187/0975
Assignment of Assignor's Interest
Recorded: 2018-06-25
Pages: 3
Assignors
LIN, BO-JIUN
Executed: 2015-10-15
CHEN, HAI-CHING
Executed: 2015-10-15
BAO, TIEN-I
Executed: 2015-10-15
Assignee
TAIWAN SEMICONDUCTOR MANUFACTURING COMPANY, LTD.
NO. 8, LI-HSIN RD. 6, SCIENCE-BASED INDUSTRIAL PARK, HSIN-CHU, 300-77, TAIWAN
Covered Property
(1)
System and Method of Forming a Porous Low-K Structure