Patent Assignment
Reel/Frame 046203/0202
Assignment of Assignor's Interest
Recorded: 2018-06-26
Pages: 4
Assignee
LAM RESEARCH CORPORATION
4650 CUSHING PARKWAY, FREMONT, CALIFORNIA, 94538
Covered Property
(1)
In Situ Vapor Deposition Polymerization to Form Polymers as Precursors to Viscoelastic Fluids for Particle Removal from Substrates