Patent Assignment
Reel/Frame 046228/0430
Assignment of Assignor's Interest
Recorded: 2018-06-28
Pages: 4
Assignee
TOKYO ELECTRON LIMITED
3-1 AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Plasma Generating Unit and Plasma Processing Apparatus