Patent Assignment
Reel/Frame 046238/0630
Assignment of Assignor's Interest
Recorded: 2018-06-29
Pages: 6
Assignors
VAN DER LAAN, HANS
Executed: 2016-01-08
TEL, WIM TJIBBO
Executed: 2016-01-08
JOCHEMSEN, MARINUS
Executed: 2016-01-13
HUNSCHE, STEFAN
Executed: 2016-01-13
Assignee
ASML NETHERLANDS B.V.
P.O. BOX 324, VELDHOVEN, 5500 AH, NETHERLANDS
Covered Property
(1)
Selection of Measurement Locations for Patterning Processes