Selection of measurement locations for patterning processes

1. A method of selecting a measurement location, the method comprising:

obtaining pattern data describing a pattern to be applied to substrates in a patterning process;

obtaining a process characteristic measured during, or following, processing of a substrate, the process characteristic characterizing the processing of the substrate;

determining, by a hardware computer, a simulated result of the patterning process based on the pattern data and the process characteristic; and

selecting, based on the simulated result, a measurement location for the substrate.

2. The method of claim 1 , wherein obtaining pattern data comprises obtaining a reticle model or a design layout.

3. The method of claim 1 , wherein obtaining a process characteristic comprises obtaining a process characteristic measured during patterning of the substrate.

4. The method of claim 3 , wherein obtaining a process characteristic measured during patterning of the substrate comprises:

obtaining a leveling measurement indicative of an orientation of at least part of a surface of the substrate relative to a lithography apparatus performing the patterning process, and/or

obtaining an intensity of radiation used in the patterning process, and/or

obtaining a stage performance parameter of a stage holding the substrate during at least part of the patterning process, and/or

obtaining a value indicative of thermal distortion of an optical element used in the patterning process, and/or

obtaining a value indicative of pre or post exposure processing of resist during the patterning process.

5. The method of claim 1 , wherein obtaining a process characteristic comprises obtaining a process characteristic measured before at least one process of patterning the substrate.

6. The method of claim 5 , wherein obtaining a process characteristic measured before at least one process of patterning the substrate comprises:

obtaining a film thickness of a layer of the substrate, and/or

obtaining a value indicative of an amount of misalignment between patterns in two layers of the substrate.

7. The method of claim 1 , wherein determining a simulated result of the patterning process comprises:

simulating the patterning process with means for modeling the patterning process, and/or

predicting a dimension of a pattern applied to the substrate based on a computational lithographic simulation comprising:

a projection optics model; and

a resist model.

8. The method of claim 1 , wherein selecting the measurement location for the substrate based on the simulated result comprises comparing the simulated result to tolerances for the pattern and selecting the measurement location based on differences between respective tolerances and corresponding structures in the simulated result.

9. The method of claim 1 , comprising:

obtaining additional values of the process characteristic, the additional values being measured during, or following, the processing of a plurality of substrates including the substrate;

simulating the patterning process for each of the plurality of substrates based on the pattern data and corresponding instances of the process characteristic, to produce a plurality of simulation results; and

selecting, based on the plurality of simulated results, the substrate from among the plurality of substrates, the substrate being selected to undergo a measurement.

10. The method of claim 1 , comprising:

scoring a plurality of candidate measurement locations based on differences between the simulated result and tolerances of the pattern; and

selecting, based on relative values of the scores, measurement locations, including the measurement location, from among the candidate measurement locations.

11. The method of claim 10 , wherein selecting measurement locations comprises weighting the scores based on one or more of the following parameters and selecting based on relative values of the weighted scores:

a type of product being patterned in a multi-product exposure field;

a sensitivity of the candidate measurement location to process drift; or

a sensitivity of the candidate measurement location to electrical, optical, or mechanical performance in the device being patterned.

12. The method of claim 1 , further comprising:

measuring the substrate at the measurement location; and

adjusting the patterning process based on a measured value from the measurement location.

13. A system, comprising:

one or more processors; and

memory storing instructions that are configured, upon execution by at least one processor of the one or more processors, to cause the at least processors to at least:

obtain pattern data describing a pattern to be applied to a substrate in a patterning process;

obtain a process characteristic measured during, or following, processing of a substrate, the process characteristic characterizing the processing of the substrate;

determine a simulated result of the patterning process based on the pattern data and the process characteristic; and

select, based on the simulated result, a measurement location for the substrate.

14. The system of claim 13 , further comprising:

a lithographic apparatus configured to pattern the substrate and being simulated in the simulated result; or

a metrology tool configured to inspect the substrate at the measurement location.

15. A tangible, non-transitory, machine-readable medium storing instructions, the instructions, upon execution by a data processing apparatus, are configured to cause the data processing apparatus to at least:

obtain pattern data describing a pattern to be applied to substrates in a patterning process;

obtain a process characteristic measured during, or following, processing of a substrate, the process characteristic characterizing the processing of the substrate;

determine a simulated result of the patterning process based on the pattern data and the process characteristic; and

select, based on the simulated result, a measurement location for the substrate.

16. The machine-readable medium of claim 15 , wherein the determination of a simulated result of the patterning process comprises:

simulation of the patterning process with means for modeling the patterning process, and/or

prediction of a dimension of a pattern applied to the substrate based on a computational lithographic simulation comprising:

a projection optics model; and

a resist model.

17. The machine-readable medium of claim 15 , wherein selection of the measurement location for the substrate based on the simulated result comprises comparison of the simulated result to tolerances for the pattern and selection of the measurement location based on differences between respective tolerances and corresponding structures in the simulated result.

18. The machine-readable medium of claim 15 , wherein the instructions are further configured to cause the data processing apparatus to:

obtain additional values of the process characteristic, the additional values being measured during, or following, the processing of a plurality of substrates including the substrate;

simulate the patterning process for each of the plurality of substrates based on the pattern data and corresponding instances of the process characteristic, to produce a plurality of simulation results; and

select, based on the plurality of simulated results, the substrate from among the plurality of substrates, the substrate being selected to undergo a measurement.

19. The machine-readable medium of claim 15 , wherein the instructions are further configured to cause the data processing apparatus to:

score a plurality of candidate measurement locations based on differences between the simulated result and tolerances of the pattern; and

select, based on relative values of the scores, measurement locations, including the measurement location, from among the candidate measurement locations.

20. The machine-readable medium of claim 19 , wherein selection of measurement locations comprises weighting of the scores based on one or more of the following parameters and selection based on relative values of the weighted scores:

a type of product being patterned in a multi-product exposure field;

a sensitivity of the candidate measurement location to process drift; or

a sensitivity of the candidate measurement location to electrical, optical, or mechanical performance in the device being patterned.