Patent Assignment
Reel/Frame 046341/0951
Assignment of Assignor's Interest
Recorded: 2018-07-13
Pages: 3
Assignor
TSUJI, AKIHIRO
Executed: 2018-07-03
Assignee
TOKYO ELECTRON LIMITED
3-1, AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Etching Method