Patent Assignment
Reel/Frame 046348/0185
Assignment of Assignor's Interest
Recorded: 2018-07-13
Pages: 2
Assignor
KOBAYASHI, SHINJI
Executed: 2018-07-06
Assignee
TOKYO ELECTRON LIMITED
3-1, AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Substrate Treatment Method, Computer Storage Medium and Substrate Treatment System