Patent Assignment
Reel/Frame 046466/0045
Assignment of Assignor's Interest
Recorded: 2018-07-26
Pages: 3
Assignee
TOKYO ELECTRON LIMITED
3-1, AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Method for Calibrating Measuring Device and Case Used in the Calibration Method