Method for calibrating measuring device and case used in the calibration method

1. A method for calibrating a measuring device by using a case, wherein the measuring device includes:

a disk-shaped base substrate;

a plurality of sensor electrodes provided on the base substrate;

a high frequency oscillator configured to apply a high frequency signal to the plurality of sensor electrodes; and

an operation unit configured to calculate a plurality of measurement values indicating electrostatic capacitances of the plurality of sensor electrodes by using a plurality of functions from a plurality of detection values corresponding to potentials of the plurality of sensor electrodes,

wherein the case includes:

a case main body configured to accommodate the measuring device;

a restricting portion configured to restrict translation of the measuring device accommodated in the case main body; and

a plurality of first reference surfaces provided in the case main body to face the respective sensor electrodes,

the method comprising:

acquiring a plurality of first detection values, which is the plurality of detection values, in a state where translation of the measuring device is restricted by the restricting portion, the plurality of first reference surfaces face the respective sensor electrodes and the high frequency signal is applied to the plurality of sensor electrodes; and

calibrating coefficients in the plurality of functions such that a plurality of first measurement values which is the plurality of measurement values calculated from the plurality of detection values becomes a first predetermined value,

wherein the plurality of sensor electrodes is provided along a side surface of the base substrate or arranged in a circumferential direction along an edge of a bottom surface of the base substrate.

2. The method of claim 1 , wherein the measuring device further includes:

a plurality of guard electrodes surrounding the respective sensor electrodes; and

a plurality of variable impedance circuits connected between the plurality of sensor electrodes and the high frequency oscillator,

wherein the high frequency oscillator is configured to further apply the high frequency signal to the plurality of guard electrodes, and

each of the plurality of detection values corresponds to a potential difference between a potential of one of the plurality of sensor electrodes and a potential of one of the plurality of guard electrodes which surrounds said one of the sensor electrodes,

the method further comprising:

adjusting impedances of the plurality of variable impedance circuits such that the plurality of detection values becomes zero in a state where the high frequency oscillator applies the high frequency signal to the plurality of sensor electrodes and the plurality of guard electrodes and a space which makes the plurality of detection values zero is provided in front of the plurality of sensor electrodes in the case main body.

3. The method of claim 1 ,

wherein the plurality of first reference surfaces is arranged in a circumferential direction to face the plurality of sensor electrodes.

4. The method of claim 1 , wherein the case further includes a plurality of second reference surfaces different from the plurality of first reference surfaces,

wherein the plurality of second reference surfaces is provided such that electrostatic capacitances of the plurality of sensor electrodes which are measured when the plurality of second reference surfaces face the respective sensor electrodes become different from electrostatic capacitances of the plurality of sensor electrodes which are measured when the plurality of first reference surfaces face the respective sensor electrodes,

the method further comprising:

acquiring a plurality of second detection values, which is the plurality of detection values, in a state where translation of the measuring device is restricted by the restricting portion, and the plurality of second reference surfaces face the plurality of sensor electrodes and the high frequency signal is applied to the plurality of sensor electrodes,

wherein in said calibrating the coefficients in the plurality of functions, the coefficients in the plurality of functions are calibrated such that the plurality of first measurement values becomes the first predetermined value and the plurality of second measurement values that is the plurality of measurement values calculated from the plurality of second detection values becomes a second predetermined value.

5. The method of claim 4 , wherein the plurality of sensor electrodes is provided along an edge of the base substrate, and

the plurality of first reference surfaces and the plurality of second reference surfaces are alternately arranged along the circumferential direction to face the plurality of sensor electrodes.

6. The method of claim 4 , wherein the plurality of sensor electrodes is arranged in the circumferential direction along a bottom surface of the base substrate, and

the plurality of first reference surfaces is alternately arranged along the circumferential direction to face the plurality of sensor electrodes.

7. The method of claim 1 , wherein the case further includes a gas exhaust port connecting the case main body to a gas exhaust unit,

the method further comprising:

exhausting the case main body.

8. The method of claim 1 , wherein the measuring device further includes a battery and a power supply terminal connected to the battery,

the case further includes a connector for power supply, and

the power supply terminal and the connector are electrically connected in a state where the measuring device is accommodated in the case main body.

9. The method of claim 1 , wherein the first predetermined value is determined according to distances between the plurality of sensor electrodes and the plurality of first reference surfaces, and

the plurality of sensor electrodes are the one-to-one correspondence with the plurality of first reference surfaces.