Patent Assignment
Reel/Frame 046499/0582
Assignment of Assignor's Interest
Recorded: 2018-07-30
Pages: 4
Assignors
HARUMOTO, MASAHIKO
Executed: 2018-07-25
ASAI, MASAYA
Executed: 2018-07-11
TANAKA, YUJI
Executed: 2018-07-17
KANEYAMA, KOJI
Executed: 2018-07-25
Assignee
SCREEN HOLDINGS CO., LTD.
TENJINKITA-MACHI 1-1, TERANOUCHI-AGARU 4-CHOME, HORIKAWA-DORI, KAMIGYO-KU, KYOTO-SHI, KYOTO, 602-8585, JAPAN
Covered Property
(1)
Substrate Processing Apparatus and Substrate Processing Method