Patent Assignment
Reel/Frame 046525/0413
Assignment of Assignor's Interest
Recorded: 2018-08-01
Pages: 4
Assignors
WEDI, ANDRE
Executed: 2018-06-29
BOENIG, GUIDO
Executed: 2018-06-29
OESCHLER, NIELS
Executed: 2018-06-29
STAHLHUT, CHRISTIAN
Executed: 2018-06-29
Assignee
INFINEON TECHNOLOGIES AG
AM CAMPEON 1-15, NEUBIBERG, 85579, GERMANY
Covered Property
(1)
Apparatus and Method for Processing a Semiconductor Substrate