Apparatus and method for processing a semiconductor substrate
A method includes placing a semiconductor substrate on a first curved surface of a first bending tool, using a second bending tool with a second surface to apply pressure to the semiconductor substrate, thereby pressing the semiconductor substrate onto the first curved surface and bending the semiconductor substrate, and removing the bended semiconductor substrate from the first bending tool.
1. A method, comprising:
placing a semiconductor substrate on a first curved surface of a first bending tool, the semiconductor substrate comprising a dielectric insulation layer, a first metallization layer and a second metallization layer, the dielectric insulation layer being disposed between the first and the second metallization layers;
arranging a semiconductor body on the first metallization layer of the semiconductor substrate, with a contact layer arranged between the semiconductor body and the first metallization layer;
using a second tool with a second surface to apply a first pressure to the semiconductor substrate and to the semiconductor body arranged on the semiconductor substrate, thereby pressing the semiconductor body onto the semiconductor substrate and the semiconductor substrate onto the first curved surface of the first bending tool, thereby joining the semiconductor body to the semiconductor substrate and pre-bending the semiconductor substrate with the semiconductor body mounted thereon;
removing the pre-bended semiconductor substrate from the first tool; and
after removing the pre-bended semiconductor substrate from the first tool, mounting the pre-bended semiconductor substrate to a bended base plate or heat sink, wherein mounting the pre-bended semiconductor substrate to the bended base plate or heat sink comprises:
forming a first connection layer on the bended base plate or heat sink; and
arranging the pre-bended semiconductor substrate with the semiconductor body mounted thereon on the first connection layer and joining the semiconductor substrate to the base plate or heat sink using a soldering process.
2. The method of claim 1 , wherein the semiconductor substrate is placed on the first curved surface of the first bending tool such that the second metallization layer faces the first curved surface.
3. The method of claim 1 , wherein joining the semiconductor substrate to the base plate or heat sink comprises applying a second pressure to the semiconductor substrate.
4. The method of claim 3 , wherein applying the second pressure to the semiconductor substrate comprises placing weights on the semiconductor substrate.
5. The method of claim 3 , wherein the second pressure is lower than the first pressure.
6. The method of claim 1 , wherein the semiconductor body is mounted to the first metallization layer using a sintering process.
7. The method of claim 1 , further comprising:
arranging a layer of compensatory material between the semiconductor substrate with the semiconductor body arranged thereon and the second surface of the second tool, wherein the layer of compensatory material is configured to distribute the first pressure that is applied to the semiconductor substrate and the semiconductor body arranged thereon by the second tool evenly over the semiconductor substrate and the semiconductor body.
8. The method of claim 1 , wherein the first pressure applied to the semiconductor substrate and the semiconductor body mounted thereon is performed at room temperature or at a temperature of up to 500° C.
9. The method of claim 1 , wherein, before mounting the semiconductor substrate to the base plate or heat sink, a deflection of the bended semiconductor substrate with the semiconductor body mounted thereon corresponds to a deflection of the bended base plate or heat sink, and the first connection layer has an even thickness.
10. The method of claim 9 , wherein the thickness of the first connection layer has a deviation of maximally ±75 μm from an average thickness over its entire area.
11. The method of claim 1 , wherein, before mounting the semiconductor substrate to the base plate or heat sink, a deflection of the bended semiconductor substrate with the semiconductor body mounted thereon differs from a deflection of the bended base plate or heat sink and the first connection layer has a thickness which is greater below a center of the semiconductor substrate and smaller near edges of the semiconductor substrate.
12. The method of claim 11 , wherein the thickness of the first connection layer has a deviation of maximally ±75 μm from an average thickness over its entire area.
13. The method of claim 1 , wherein, before mounting the semiconductor substrate to the base plate or heat sink, a deflection of the bended semiconductor substrate with the semiconductor body mounted thereon differs from a deflection of the bended base plate or heat sink and the first connection layer has a thickness which is smaller below a center of the semiconductor substrate and greater near edges of the semiconductor substrate.
14. The method of claim 13 , wherein the thickness of the first connection layer has a deviation of maximally ±75 μm from an average thickness over its entire area.