Patent Assignment
Reel/Frame 046526/0411
Assignment of Assignor's Interest
Recorded: 2018-08-01
Pages: 3
Assignee
ASML NETHERLANDS B.V.
PO BOX 324, VELDHOVEN, NL-5500 AH, NETHERLANDS
Covered Property
(1)
Method and Apparatus to Determine a Patterning Process Parameter