Patent Assignment
Reel/Frame 046538/0077
Assignment of Assignor's Interest
Recorded: 2018-08-02
Pages: 4
Assignors
AGARWAL, PULKIT
Executed: 2018-06-21
LAVOIE, ADRIEN
Executed: 2018-06-21
KUMAR, RAVI
Executed: 2018-08-01
KUMAR, PURUSHOTTAM
Executed: 2018-06-21
Assignee
LAM RESEARCH CORPORATION
4650 CUSHING PARKWAY, FREMONT, CALIFORNIA, 94538
Covered Property
(1)
Compensating Chamber and Process Effects to Improve Critical Dimension Variation for Trim Process