Patent Assignment
Reel/Frame 046573/0430
Assignment of Assignor's Interest
Recorded: 2018-08-07
Pages: 4
Assignors
ATASOY, HAKKI HAKAN
Executed: 2013-05-17
GRÜTZNER, GABI
Executed: 2013-05-17
VOGLER, MARKO
Executed: 2013-05-17
Assignee
MICRO RESIST TECHNOLOGY GESELLSCHAFT FÜR CHEMISCHE MATERIALIEN SPEZIELLER PROTORESISTSYSTEME GMBH
KOEPENICKER STRASSE 325, BERLIN, 12555, GERMANY
Covered Property
(1)
Composition Suitable for Use as a Release-Optimized Material for Nanoimprint Processes and Uses Thereof