Patent Assignment
Reel/Frame 046628/0409
Assignment of Assignor's Interest
Recorded: 2018-08-13
Pages: 6
Assignors
LI, JUNTAO
Executed: 2018-08-13
CHENG, KANGGUO
Executed: 2018-08-13
ANDERSON, BRENT A.
Executed: 2018-08-13
Assignee
INTERNATIONAL BUSINESS MACHINES CORPORATION
NEW ORCHARD ROAD, ARMONK, NEW YORK, 10504
Covered Property
(1)
A Method of Forming First and Second Contacts Self-Aligned to Source/Drain Region of a Vertical Field-Effect Transistor with Strain Channel