Patent Assignment
Reel/Frame 046644/0502
Assignment of Assignor's Interest
Recorded: 2018-08-21
Pages: 4
Assignor
TOBE, YASUHIRO
Executed: 2018-07-27
Assignee
TOKYO ELECTRON LIMITED
3-1 AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Substrate Processing Apparatus, and Operation Method for Substrate Processing Apparatus