Patent Assignment
Reel/Frame 046698/0338
Assignment of Assignor's Interest
Recorded: 2018-08-24
Pages: 6
Assignors
WAGATSUMA, YUICHIRO
Executed: 2018-08-06
KANEKO, MIYAKO
Executed: 2018-08-06
NORO, NAOTAKA
Executed: 2018-08-06
Assignee
TOKYO ELECTRON LIMITED
AKASAKA BIZ TOWER, 3-1 AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Film-Forming Method and Film-Forming Apparatus