Patent Assignment
Reel/Frame 046706/0767
Assignment of Assignor's Interest
Recorded: 2018-08-27
Pages: 10
Assignors
TOYODA, KAZUYUKI
Executed: 2018-07-03
YUASA, KAZUHIRO
Executed: 2018-07-02
YAMAMOTO, TETSUO
Executed: 2018-07-02
Assignee
KOKUSAI ELECTRIC CORPORATION
3-4, KANDAKAJI-CHO, CHIYODA-KU, TOKYO, 105-0045, JAPAN
Covered Property
(1)
Substrate Processing Apparatus, Method of Manufacturing Semiconductor Device, and Non-Transitory Computer-Readable Recording Medium
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.