Patent Assignment
Reel/Frame 046716/0359
Assignment of Assignor's Interest
Recorded: 2018-08-27
Pages: 5
Assignors
WANG, CHARLIE
Executed: 2018-03-28
TSENG, YU-PING
Executed: 2018-03-28
CHEN, Y.J.
Executed: 2018-03-28
YEUNG, WAI-MING
Executed: 2018-03-28
CHEN, CHIEN-SHEN
Executed: 2018-03-28
KUO, DANNY
Executed: 2018-03-28
HSIEH, YU-HSUAN
Executed: 2018-03-23
LO, HSUAN
Executed: 2018-03-28
Assignee
TAIWAN SEMICONDUCTOR MANUFACTURING CO., LTD.
NO. 8, LI-HSIN ROAD 6, HSINCHU SCIENCE PARK, HSIN-CHU, 300-77, TAIWAN
Covered Property
(1)
Method and Apparatus for Cleaning Process Monitoring