Patent Assignment
Reel/Frame 046740/0630
Assignment of Assignor's Interest
Recorded: 2018-08-29
Pages: 10
Assignors
TSUKANO, KENTO
Executed: 2018-07-23
GOSHI, GENTARO
Executed: 2018-08-29
MASUZUMI, TAKURO
Executed: 2018-07-23
KIYOSE, HIROMI
Executed: 2018-07-23
FUKUI, SHOGO
Executed: 2018-08-08
Assignee
TOKYO ELECTRON LIMITED
3-1 AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Substrate Processing Method, Recording Medium and Substrate Processing System