Patent Assignment
Reel/Frame 046741/0417
Assignment of Assignor's Interest
Recorded: 2018-08-29
Pages: 6
Assignors
SASAKI, YASUHARU
Executed: 2018-08-23
HIRAI, KATSUNORI
Executed: 2018-08-27
SASAKI, JUNICHI
Executed: 2018-08-23
Assignee
TOKYO ELECTRON LIMITED
3-1, AKASAKA 5-CHOME, MINATO-KU,, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Dechuck Control Method and Plasma Processing Apparatus