Patent Assignment
Reel/Frame 046820/0021
Assignment of Assignor's Interest
Recorded: 2018-09-07
Pages: 6
Assignee
TOKYO ELECTRON LIMITED
3-1, AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Power Modulation for Etching High Aspect Ratio Features