Patent Assignment
Reel/Frame 046836/0694
Assignment of Assignor's Interest
Recorded: 2018-08-15
Pages: 3
Assignors
ROOBOL, SANDER BAS
Executed: 2017-03-01
MATHIJSSEN, SIMON GIJSBERT JOSEPHUS
Executed: 2017-03-01
BÄUMER, STEFAN MICHAEL BRUNO
Executed: 2017-03-02
Assignee
ASML NETHERLANDS B.V.
P.O. BOX 324, VELDHOVEN, 5500 AH, NETHERLANDS
Covered Property
(1)
Methods of Aligning a Diffractive Optical System and Diffracting Beams, Diffractive Optical Element and Apparatus