Patent Assignment
Reel/Frame 046842/0990
Assignment of Assignor's Interest
Recorded: 2018-09-11
Pages: 8
Assignors
NAKATANI, KIMIHIKO
Executed: 2018-08-22
KAMAKURA, TSUKASA
Executed: 2018-08-23
KARASAWA, HAJIME
Executed: 2018-08-28
HARADA, KAZUHIRO
Executed: 2018-08-22
Assignee
KOKUSAI ELECTRIC CORPORATION
3-4, KANDAKAJI-CHO,, CHIYODA-KU, TOKYO, 101-0045, JAPAN
Covered Property
(1)
Method of Manufacturing Semiconductor Device, Substrate Processing Apparatus, and Recording Medium
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.