Method of manufacturing semiconductor device, substrate processing apparatus, and recording medium
There is provided a technique that includes: forming a film on a substrate by performing, simultaneously at least for a predetermined period: supplying a first precursor to the substrate, the first precursor containing a chemical bond of a predetermined element and nitrogen or a chemical bond of the predetermined element and carbon, containing a chemical bond of the predetermined element and hydrogen, and not containing a chemical bond of nitrogen and hydrogen; and supplying a pseudo catalyst to the substrate, the pseudo catalyst containing a Group 13 element and not containing the chemical bond of nitrogen and hydrogen, wherein in the act of forming the film, a substance containing the chemical bond of nitrogen and hydrogen is not supplied to the substrate.
1. A method of processing a substrate, comprising:
forming a film on the substrate by performing a cycle that includes:
supplying a first precursor to the substrate in a process chamber, the first precursor being a substance represented by a structural formula of Si n C m H 2n+2m+2 or Si n C m H 2n+2m where n is a positive integer and m is a positive integer, and not containing a chemical bond of nitrogen and hydrogen;
supplying a second precursor to the substrate in the process chamber, the second precursor differing in molecular structure from the first precursor, being a substance represented by a structural formula of Si j H 2j+2 where j is a positive integer, and not containing the chemical bond of nitrogen and hydrogen; and
supplying a pseudo catalyst to the substrate in the process chamber, the pseudo catalyst being a substance represented by a structural formula of YZ 3 where Y is a Group 13 element and Z is a functional group selected from the group of hydrogen, a halogen group, an alkyl group, an amino group, an alkoxy group, and a hydroxy group, and not containing the chemical bond of nitrogen and hydrogen,
wherein in the act of forming the film, a substance containing the chemical bond of nitrogen and hydrogen is not supplied to the substrate,
wherein in the act of supplying the first precursor, a temperature of the substrate is set to a first temperature at which the first precursor is not pyrolized when the first precursor exists alone,
wherein in the act of supplying the second precursor, a temperature of the substrate is set to a second temperature at which the second precursor is not pyrolized when the second precursor exists alone,
wherein in each cycle, the act of supplying the first precursor and the act of supplying the pseudo catalyst are alternately performed,
wherein in each cycle, one among the first precursor and the pseudo catalyst, which has been supplied earlier than the other one among the first precursor and the pseudo catalyst, is contained in the process chamber without being removed from the process chamber until the other one is supplied, and
wherein in each cycle, the other one among the first precursor and the pseudo catalyst, which has been supplied later, reacts with the one among the first precursor and the pseudo catalyst, which has been supplied earlier, to decompose a part of the pseudo catalyst.
2. The method according to claim 1 , wherein the pseudo catalyst contains boron or aluminum as the Group 13 element.
3. The method according to claim 1 , wherein in the act of forming the film, a pressure in a space in which the substrate exists is set to 1 Pa or higher and 600 Pa or lower.
4. A method of manufacturing a semiconductor device, comprising:
forming a film on a substrate for manufacturing the semiconductor device by performing a cycle that includes:
supplying a first precursor to the substrate in a process chamber, the first precursor being a substance represented by a structural formula of Si n C m H 2n+2m+2 or Si n C m H 2n+2m where n is a positive integer and m is a positive integer, and not containing a chemical bond of nitrogen and hydrogen;
supplying a second precursor to the substrate in the process chamber, the second precursor differing in molecular structure from the first precursor, being a substance represented by a structural formula of Si j H 2j+2 where j is a positive integer, and not containing the chemical bond of nitrogen and hydrogen; and
supplying a pseudo catalyst to the substrate in the process chamber, the pseudo catalyst being a substance represented by a structural formula of YZ 3 where Y is a Group 13 element and Z is a functional group selected from the group of hydrogen, a halogen group, an alkyl group, an amino group, an alkoxy group, and a hydroxy group, and not containing the chemical bond of nitrogen and hydrogen,
wherein in the act of forming the film, a substance containing the chemical bond of nitrogen and hydrogen is not supplied to the substrate,
wherein in the act of supplying the first precursor, a temperature of the substrate is set to a first temperature at which the first precursor is not pyrolized when the first precursor exists alone,
wherein in the act of supplying the second precursor, a temperature of the substrate is set to a second temperature at which the second precursor is not pyrolized when the second precursor exists alone,
wherein in each cycle, the act of supplying the first precursor and the act of supplying the pseudo catalyst are alternately performed,
wherein in each cycle, one among the first precursor and the pseudo catalyst, which has been supplied earlier than the other one among the first precursor and the pseudo catalyst, is contained in the process chamber without being removed from the process chamber until the other one is supplied, and
wherein in each cycle, the other one among the first precursor and the pseudo catalyst, which has been supplied later, reacts with the one among the first precursor and the pseudo catalyst, which has been supplied earlier, to decompose a part of the pseudo catalyst.
5. The method according to claim 1 , wherein the second precursor includes a disilane or silicon hydride having a higher order than the disilane.
6. The method according to claim 1 , wherein in the act of supplying the pseudo catalyst, a temperature of the substrate is set to a temperature at which the pseudo catalyst is not pyrolized when the pseudo catalyst exists alone.
7. The method according to claim 1 , wherein the first precursor includes a substance acting as a Lewis base in the act of forming the film, and
wherein the pseudo catalyst includes a substance acting as a Lewis acid, which acts on the substance acting as the Lewis base included in the first precursor to extract protons from the chemical bond of silicon and hydrogen contained in the first precursor, in the act of forming the film.
8. The method according to claim 1 , wherein in the act of forming the film, the temperature of the substrate is set to 150 degrees C. or higher and 400 degrees C. or lower.