Patent Assignment
Reel/Frame 046934/0467
Assignment of Assignor's Interest
Recorded: 2018-09-21
Pages: 10
Assignors
OKUDA, KAZUYUKI
Executed: 2018-08-31
MINAMI, MASAYOSHI
Executed: 2018-09-03
NAKAMURA, YOSHINOBU
Executed: 2018-08-31
TAKAGI, KOSUKE
Executed: 2018-09-03
KAGA, YUKINAO
Executed: 2018-08-31
TAKEBAYASHI, YUJI
Executed: 2018-09-03
Assignee
KOKUSAI ELECTRIC CORPORATION
3-4, KANDAKAJI-CHO, CHIYODA-KU, TOKYO, 101-0045, JAPAN
Covered Property
(1)
Method of Manufacturing Semiconductor Device, Substrate Processing Apparatus, and Recording Medium