Patent Assignment
Reel/Frame 046959/0531
Assignment of Assignor's Interest
Recorded: 2018-09-25
Pages: 5
Assignor
CHUNG, JUN YOUNG
Executed: 2018-09-20
Assignee
TOKYO ELECTRON LIMITED
3-1, AKASAKA 5-CHOME, MINATO-KU,, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Temperature Control Method