Temperature control method

1. A temperature control method of controlling a temperature of an object to be processed, the temperature control method comprising:

supplying a heat-transfer gas between an object to be processed and a mounting stage from a gas port from among a plurality of gas ports provided in a mounting stage;

exhausting the heat-transfer gas from another gas port different from the gas port;

detecting a pressure of the gas port supplying the heat-transfer gas and another pressure of the another gas port exhausting the heat-transfer gas; and

adjusting the pressure and the another pressure.

2. The temperature control method according to claim 1 ,

wherein the plurality of gas ports are arranged to have a shape of a concentric circle, a sector, or a combination of the concentric circle and the sector.

3. The temperature control method according to claim 1 ,

wherein each of the plurality of gas ports is connected with a heat-transfer gas supply source and an exhaust device,

wherein a first control valve for controlling a flow rate of the heat-transfer gas supplied to the gas port is interposed between the heat-transfer gas supply source and the gas port, and

wherein a second control valve for controlling a flow rate of the heat-transfer gas exhausted from the another gas port is interposed between the exhaust device and the another gas port.

4. The temperature control method according to claim 3 ,

wherein adjusting the pressure is performed by controlling both the first control valve and the second control valve.

5. The temperature control method according to claim 1 ,

wherein each of the plurality of gas ports is connected with a heat-transfer gas supply source and an exhaust device,

wherein a first control valve for controlling a flow rate of the heat-transfer gas supplied to the gas port is interposed between the heat-transfer gas supply source and the gas port, and

wherein a choke mechanism is interposed between the exhaust device and the another gas port.

6. The temperature control method according to claim 5 ,

wherein adjusting the pressure is performed by controlling the first control valve.

7. A temperature control method of controlling a temperature of an object to be processed mounted on a mounting stage, the temperature control method comprising:

forming a flow of a heat-transfer gas in a horizontal direction between the object to be processed and the mounting stage;

detecting a pressure of the heat-transfer gas on an upstream side and another pressure of the heat-transfer gas of a downstream side; and

adjusting the pressure and the another pressure.