Patent Assignment
Reel/Frame 047120/0689
Assignment of Assignor's Interest
Recorded: 2018-10-10
Pages: 4
Assignee
SHANGHAI MICRO ELECTRONICS EQUIPMENT (GROUP) CO., LTD.
1525 ZHANGDONG ROAD, ZHANGJIANG HIGH-TECH PARK, SHANGHAI, 201203, CHINA
Covered Property
(1)
Substrate Transfer Device, Transfer Method and Photolithography Apparatus
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.