Patent Assignment
Reel/Frame 047126/0355
Assignment of Assignor's Interest
Recorded: 2018-10-10
Pages: 5
Assignors
TAGA, SATOSHI
Executed: 2018-07-06
KOBAYASHI, YOSHIYUKI
Executed: 2018-07-06
NAGASEKI, KAZUYA
Executed: 2018-07-06
Assignee
TOKYO ELECTRON LIMITED
3-1, AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Method of Manufacturing Electrostatic Chuck and Electrostsatic Chuck