Patent Assignment
Reel/Frame 047134/0403
Assignment of Assignor's Interest
Recorded: 2018-10-11
Pages: 3
Assignor
KANG, HOYOUNG
Executed: 2017-11-29
Assignee
TOKYO ELECTRON LIMITED
AKASAKA BIZ TOWER, 3-1 AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Back-Side Friction Reduction of a Substrate