Patent Assignment
Reel/Frame 047179/0104
Assignment of Assignor's Interest
Recorded: 2018-10-02
Pages: 4
Assignor
ZHANG, CHENGSHUANG
Executed: 2018-09-28
Assignee
SHANGHAI MICRO ELECTRONICS EQUIPMENT (GROUP) CO., LTD.
1525 ZHANGDONG ROAD, ZHANGJIANG HIGH-TECH PARK, SHANGHAI, 201203, CHINA
Covered Property
(1)
Coaxial Mask Alignment Device, Photolithography Apparatus and Alignment Method
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.