Patent Assignment
Reel/Frame 047234/0206
Assignment of Assignor's Interest
Recorded: 2018-10-19
Pages: 12
Assignors
ZHANG, JIAN
Executed: 2018-10-11
INADA, TAKAO
Executed: 2018-10-11
KAWANO, HISASHI
Executed: 2018-10-15
FUJITSU, SEIGO
Executed: 2018-10-16
SATO, HIDEAKI
Executed: 2018-10-11
KONISHI, TERUAKI
Executed: 2018-10-11
SHIOKAWA, TOSHIYUKI
Executed: 2018-10-11
OGURA, KOJI
Executed: 2018-10-11
YOSHIDA, HIROSHI
Executed: 2018-10-11
Assignee
TOKYO ELECTRON LIMITED
3-1, AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Substrate Processing Apparatus, Substrate Processing Method and Recording Medium