Substrate processing apparatus, substrate processing method and recording medium
A substrate processing apparatus, a substrate processing method and a recording medium capable of shortening an etching processing time are provided. The substrate processing apparatus includes a substrate processing tub, a mixing unit and a supply line. The substrate processing tub is configured to perform an etching processing therein with an etching liquid. The mixing unit is configured to mix a new liquid with a silicon-containing compound or a liquid containing the silicon-containing compound. The supply line is configured to supply a mixed solution mixed by the mixing unit into the substrate processing tub.
1. A substrate processing apparatus, comprising:
a substrate processing tub configured to store therein a processing liquid for performing an etching processing by immersing the substrates in the substrate processing tub;
a first circulation line configured to circulate the processing liquid in the substrate processing tub;
a mixing unit including a mixing tank configured to store therein a mixed solution which is produced by mixing a phosphoric acid aqueous solution and a silicon-containing compound or a liquid containing the silicon-containing compound;
a second circulation line configured to circulate the mixed solution in the mixing tank;
a supply line connecting the mixing unit with the substrate processing tub, the supply line configured to supply the mixed solution mixed by the mixing unit into the substrate processing tub;
a silicon supply unit configured to supply the liquid containing the silicon-containing compound into either the mixing tank through a silicon supply line or into an outer tub of the substrate processing tub through a branch line branched from the silicon supply line via a three-way valve; and
a control unit configured to control the silicon supply unit to supply the liquid containing the silicon-containing compound into the substrate processing tub after the etching processing is begun,
wherein one end of the first circulation line is connected to the outer tub of the substrate processing tub while another end of the first circulation line is connected to an inner tub of the substrate processing tub, and the first circulation line includes a pump, a heater and a filter that is directly connected to a drain line with a flow controller, wherein the drain line is branched off from the filter, and
the processing liquid is fed into the inner tub from the outer tub through the first circulation line via the pump, the heater and the filter, and
wherein the silicon supply line connects a silicon source to the mixing tank,
the branch line connects the silicon supply line to the outer tub of the substrate processing tub, and
the control unit is configured to switch the three-way valve to supply the liquid containing the silicon-containing compound into a selected one of the mixing tank and the outer tub of the substrate processing tub.
2. The substrate processing apparatus of claim 1 ,
wherein the mixing unit is configured to mix the liquid containing the silicon-containing compound and a solvent configured to dissolve the liquid containing the silicon-containing compound at a room temperature.
3. The substrate processing apparatus of claim 1 ,
wherein the mixing unit is configured to mix pure water and the liquid containing the silicon-containing compound.
4. The substrate processing apparatus of claim 1 ,
wherein the mixing unit is configured to adjust a temperature of the mixed solution to be different from a temperature of the processing liquid.
5. The substrate processing apparatus of claim 1 ,
wherein the substrate processing apparatus is configured to process a multiplicity of substrates at the same time.