Patent Assignment
Reel/Frame 047260/0307
Assignment of Assignor's Interest
Recorded: 2018-10-22
Pages: 5
Assignor
YAMAGUCHI, TATSUYA
Executed: 2018-09-20
Assignee
TOKYO ELECTRON LIMITED
AKASAKA BIZ TOWER, 3-1 AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Method of Manufacturing Semiconductor Device and Substrate Processing Apparatus