Patent Assignment
Reel/Frame 047304/0818
Assignment of Assignor's Interest
Recorded: 2018-10-25
Pages: 7
Assignors
BAGGETT, JOHN F.
Executed: 2018-10-24
BENOIT, BILLY T.
Executed: 2018-10-24
FERRARA, JOE
Executed: 2018-10-24
TERRY, BRIAN
Executed: 2018-10-24
Assignee
AXCELIS TECHNOLOGIES, INC.
108 CHERRY HILL DRIVE, BEVERLY, MASSACHUSETTS, 01915
Covered Property
(1)
Shallow Angle, Multi-Wavelength, Multi-Receiver, Adjustable Sensitivity Aligner Sensor for Semiconductor Manufacturing Equipment
Related Assignments
(2)
Other recorded transfers of the patent in this record — the chain of ownership.
Security Interest
Jul 31, 2020
From: AXCELIS TECHNOLOGIES, INC.
To: SILICON VALLEY BANK, AS ADMINISTRATIVE AGENT
Reel/Frame 053375/0055 →
Release of Security Interest
Apr 7, 2023
From: SILICON VALLEY BANK A DIVISION OF FIRST-CITIZENS BANK & TRUST COMPANY
To: AXCELIS TECHNOLOGIES, INC.
Reel/Frame 063270/0277 →