Patent Assignment
Reel/Frame 047353/0513
Change of Name
Recorded: 2018-10-30
Pages: 32
Assignor
HITACHI KOKUSAI ELECTRIC INC.
Executed: 2018-06-01
Assignee
KOKUSAI ELECTRIC CORPORATION
3-4 KANDA-KAJICHO, CHIYODA-KU, TOKYO, JAPAN
Covered Properties
(4)
Substrate Processing Apparatus
Substrate Processing Apparatus
Application:
14/592,090 →
Publication:
US 2015/0140839
Method of Manufacturing Semiconductor Device and Method of Processing Substrate
Method of Manufacturing Semiconductor Device and Substrate Processing Apparatus for Forming Film Including at Least Two Different Elements
Application:
15/468,627 →
Publication:
US 2017/0200599
Related Assignments
(2)
Other recorded transfers of the patents in this record — the chain of ownership.