Patent Assignment
Reel/Frame 047354/0974
Assignment of Assignor's Interest
Recorded: 2018-10-30
Pages: 4
Assignors
FELIX, NELSON
Executed: 2018-10-29
DE SILVA, EKMINI ANUJA
Executed: 2018-10-29
THOMPSON, LUCIANA MELI
Executed: 2018-10-29
MIGNOT, YANN
Executed: 2018-10-29
Assignee
INTERNATIONAL BUSINESS MACHINES CORPORATION
NEW ORCHARD ROAD, ARMONK, NEW YORK, 10504
Covered Property
(1)
Spacer-Defined Process for Lithography-Etch Double Patterning for Interconnects