Patent Assignment
Reel/Frame 047361/0506
Assignment of Assignor's Interest
Recorded: 2018-10-30
Pages: 5
Assignee
EBARA CORPORATION
11-1, HANEDA ASAHI-CHO, OTA-KU, TOKYO, 144-8510, JAPAN
Covered Property
(1)
Polishing Apparatus and Polishing Method