Patent Assignment
Reel/Frame 047372/0144
Assignment of Assignor's Interest
Recorded: 2018-10-31
Pages: 3
Assignor
HITACHI KOKUSAI ELECTRIC INC.
Executed: 2018-10-15
Assignee
KOKUSAI ELECTRIC CORPORATION
3-4, KANDAKAJI-CHO, CHIYODA-KU, TOKYO, 1010045, JAPAN
Covered Property
(1)
Substrate Processing Method and Substrate Processing Apparatus