Patent Assignment
Reel/Frame 047398/0492
Assignment of Assignor's Interest
Recorded: 2018-11-01
Pages: 4
Assignors
MORITA, SATOSHI
Executed: 2018-10-30
IKEBE, RYOJI
Executed: 2018-09-14
NODA, YASUAKI
Executed: 2018-09-14
KOGA, NORIHISA
Executed: 2018-09-19
HAMAMOTO, KEISUKE
Executed: 2018-09-20
HOSAKA, MASATO
Executed: 2018-09-19
Assignee
TOKYO ELECTRON LIMITED
3-1 AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Substrate Processing Apparatus