Substrate processing apparatus
A substrate processing apparatus includes carry in/out station, transfer station, processing station, and image capturing unit. The carry in/out station includes first conveyance device that takes out and conveys substrate from cassette. The transfer station is disposed adjacent to the carry in/out station, and includes substrate placement unit on which the substrate conveyed by the first conveyance device is placed. The processing station is disposed adjacent to the transfer station, and includes second conveyance device that takes out and conveys the substrate from the substrate placement unit, and a plurality of processing units that processes the substrate conveyed by the second conveyance device. The image capturing unit is disposed in the transfer station, and captures an image of the peripheral edge portion of one of the upper and lower surfaces of the substrate and the end surface of the substrate.
1. A substrate processing apparatus comprising:
a carry in/out station including a first conveyor that takes out and conveys a substrate from a cassette;
a transfer station disposed adjacent to the carry in/out station, and including a substrate holder on which the substrate conveyed by the first conveyor is placed;
a processing station disposed adjacent to the transfer station, and including a second conveyor that takes out and conveys the substrate from the substrate holder and a plurality of processing chambers that processes the substrate conveyed by the second conveyor; and
an image capturing unit disposed in the transfer station, and configured to capture an image of a peripheral edge portion of one of upper and lower surfaces of the substrate and an end surface of the substrate,
wherein the image capturing unit includes:
a mirror that reflects light reflected from the end surface of the substrate; and
a one surface side camera that receives each of light reflected from a peripheral edge portion of one surface of the substrate and the light reflected from the mirror, so as to capture an image of the peripheral edge portion of the one surface of the substrate and the end surface of the substrate at the same time.
2. The substrate processing apparatus of claim 1 , wherein the image capturing unit is disposed below the substrate holder.
3. The substrate processing apparatus of claim 2 , wherein the image capturing unit further includes an opening that opens toward a conveyance section where the second conveyor is accommodated, and
the second conveyor carries the substrate into or out from the image capturing unit via the opening.
4. The substrate processing apparatus of claim 2 , wherein the image capturing unit further includes an opposite surface side camera that captures an image of a peripheral edge portion of an opposite one of the upper and lower surfaces of the substrate.
5. The substrate processing apparatus of claim 2 , further comprising:
an adjuster that adjusts a rotational position of the substrate with respect to an image capturing range of the image capturing unit.
6. The substrate processing apparatus of claim 1 , wherein the image capturing unit further includes an opening that opens toward a conveyance section where the second conveyor is accommodated, and
the second conveyor carries the substrate into or out from the image capturing unit via the opening.
7. The substrate processing apparatus of claim 6 , wherein the image capturing unit further includes an opposite surface side camera that captures an image of a peripheral edge portion of an opposite one of the upper and lower surfaces of the substrate.
8. The substrate processing apparatus of claim 6 , further comprising:
an adjuster that adjusts a rotational position of the substrate with respect to an image capturing range of the image capturing unit.
9. The substrate processing apparatus of claim 1 , wherein the image capturing unit further includes an opposite surface side camera that captures an image of a peripheral edge portion of an opposite one of the upper and lower surfaces of the substrate.
10. The substrate processing apparatus of claim 9 , further comprising:
an adjuster that adjusts a rotational position of the substrate with respect to an image capturing range of the image capturing unit.
11. The substrate processing apparatus of claim 1 , further comprising:
an adjuster that adjusts a rotational position of the substrate with respect to an image capturing range of the image capturing unit.
12. The substrate processing apparatus of claim 11 , wherein the adjuster includes:
a rotation table that adsorbs, holds, and rotates the substrate; and
a detector that detects a notch formed in the substrate, and
while adsorbing, holding, and rotating the substrate by using the rotation table, the image capturing unit detects the notch by using the detector and adjusts the rotational position of the substrate based on a detection result.
13. The substrate processing apparatus of claim 12 , wherein after the adjustment of the rotational position of the substrate, the image capturing unit captures an image of the peripheral edge portion of one surface of the substrate and the end surface of the substrate over the entire circumference of the substrate, while rotating the substrate by using the rotation table.