Patent Assignment
Reel/Frame 047464/0202
Assignment of Assignor's Interest
Recorded: 2018-11-09
Pages: 8
Assignors
MENG, CHING-LING
Executed: 2018-11-09
TUITJE, HOLGER
Executed: 2018-07-16
CHEN, YAN
Executed: 2018-07-11
MIHAYLOV, MIHAIL
Executed: 2018-07-11
Assignee
TOKYO ELECTRON LIMITED
AKASAKA BIZ TOWER, 3-1 AKASAKA 5-CHOME, MINATO-KU, TOKYO, 107-6325, JAPAN
Covered Property
(1)
Spatially Resolved Optical Emission Spectroscopy (Oes) in Plasma Processing