Patent Assignment
Reel/Frame 047548/0151
Assignment of Assignor's Interest
Recorded: 2018-11-19
Pages: 3
Assignor
SANO, ATSUSHI
Executed: 2014-09-16
Assignee
HITACHI KOKUSAI ELECTRIC INC.
14-1, SOTOKANDA 4-CHOME, CHIYODA-KU, TOKYO, 101-8980, JAPAN
Covered Property
(1)
Substrate Processing Apparatus, Non-Transitory Computer-Readable Recording Medium Thereof and Semiconductor Manufacturing Method by Employing Thereof
Related Assignments
(1)
Other recorded transfers of the patent in this record — the chain of ownership.