Patent Assignment
Reel/Frame 047725/0013
Assignment of Assignor's Interest
Recorded: 2018-12-10
Pages: 4
Assignee
ASM IP HOLDING B.V.
VERSTERKERSTRAAT 8, 1322 AP, ALMERE, NETHERLANDS
Covered Property
(1)
Methods for Forming a Transition Metal Nitride Film on a Substrate by Atomic Layer Deposition and Related Semiconductor Device Structures