Patent Assignment
Reel/Frame 047773/0598
Assignment of Assignor's Interest
Recorded: 2018-12-14
Pages: 6
Assignors
TAKEAKI, REI
Executed: 2018-11-27
HAYASHI, MASAYUKI
Executed: 2018-11-20
OTA, TAKASHI
Executed: 2018-11-28
Assignee
SCREEN HOLDINGS CO., LTD.
TENJINKITA-MACHI 1-1, TERANOUCHI-AGARU 4-CHOME, HORIKAWA-DORI, KAMIGYO-KU, KYOTO-SHI,, KYOTO, 602-8585, JAPAN
Covered Property
(1)
Substrate Processing Apparatus and Substrate Processing Method