Patent Assignment
Reel/Frame 047925/0506
Assignment of Assignor's Interest
Recorded: 2019-01-08
Pages: 4
Assignors
LONG, MAOLIN
Executed: 2018-12-13
RASTGAR, NEEMA
Executed: 2019-01-02
PATERSON, ALEXANDER MILLER
Executed: 2018-12-13
Assignee
LAM RESEARCH CORPORATION
4650 CUSHING PARKWAY, FREMONT, CALIFORNIA, 94538
Covered Property
(1)
Metal Contamination Reduction in Substrate Processing Systems with Transformer Coupled Plasma